Mechanical modelling of capacitive RF MEMS shunt switches

Mechanical Design of RF MEMS Capacitive Switches

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

Time Characterization of Capacitive Mems Rf Switches

ESD effects in capacitive RF MEMS switches

RF MEMS have shown very attractive characteristics in automotive, communication, aeronautic and aerospace applications, thanks to its low mass and volume, low losses, low power consumption, high isolation and a wide operative frequency range. Moreover they have demonstrated good integration with electronics which show their ability to built-in innovative RF architectures [1]. Nevertheless the a...

Compact Model of Dielectric Charging in RF MEMS Capacitive Switches

RF MEMS capacitive switches show great potential for use in wireless communication device. However, their widespread insertion in commercial products requires further improvements in their longterm reliability. Dielectric charging is one of the factors that impact switch reliability. Dielectric charging is understood to mean the accumulation of electric charge in the insulating dielectric layer...

A Parametric Model of Low-loss Rf Mems Capacitive Switches

This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which operates at microwave frequencies. The switches are first characterized using a full wave analysis based on a finite element method to extract the S-parameters of the switches for different geometrical dimensions. From the S-parameter database, a scalable lumped circuit model is extracted to allow...